JPH0131660B2 - - Google Patents

Info

Publication number
JPH0131660B2
JPH0131660B2 JP57191815A JP19181582A JPH0131660B2 JP H0131660 B2 JPH0131660 B2 JP H0131660B2 JP 57191815 A JP57191815 A JP 57191815A JP 19181582 A JP19181582 A JP 19181582A JP H0131660 B2 JPH0131660 B2 JP H0131660B2
Authority
JP
Japan
Prior art keywords
electron
sample
shape
electron beam
annealing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57191815A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5981851A (ja
Inventor
Kazumichi Oomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP57191815A priority Critical patent/JPS5981851A/ja
Publication of JPS5981851A publication Critical patent/JPS5981851A/ja
Publication of JPH0131660B2 publication Critical patent/JPH0131660B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Recrystallisation Techniques (AREA)
JP57191815A 1982-11-02 1982-11-02 電子ビ−ムアニ−ル装置 Granted JPS5981851A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57191815A JPS5981851A (ja) 1982-11-02 1982-11-02 電子ビ−ムアニ−ル装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57191815A JPS5981851A (ja) 1982-11-02 1982-11-02 電子ビ−ムアニ−ル装置

Publications (2)

Publication Number Publication Date
JPS5981851A JPS5981851A (ja) 1984-05-11
JPH0131660B2 true JPH0131660B2 (en]) 1989-06-27

Family

ID=16280980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57191815A Granted JPS5981851A (ja) 1982-11-02 1982-11-02 電子ビ−ムアニ−ル装置

Country Status (1)

Country Link
JP (1) JPS5981851A (en])

Also Published As

Publication number Publication date
JPS5981851A (ja) 1984-05-11

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